Semiconductor Spare Parts In Stock

Semiconductor Parts Catalog

Dual Stack SRD Spin Rinse Dryer

Our self-developed spin rinse dryer has the specification as below:

Basic Function: DIW Rinse,Pipe Purge,Spin Dry,Hot N2.

Max. Speed of spin: Up to 2,800rpm(200 mm/2400rpm300mm/2000rpm.

With N2 continuous purge. N2 flow can be heated up to 70C.

With DIW Resistance meter.

With Anti-Static Device. With N2 Low flow interlock.

With EMO function.

Capacity: Up to 15 recipes.

Max. Steps per recipe: Up to 10 steps.

With Auto-Clean Function.

The vibration is less than 350 um while rotor spinning.(200 mm/ 300 mm,300 um).

Spin speed tolerance:Less than 10%.

With SUS-316L-EP Rotor. With SUS-316L-EP Bowl.

…And more features!

Three-way Pneumatic Diaphragm Valve

The diaphragm valve is a new type of shut-off valve, with its open-close component being a diaphragm made of soft material, which separates the valve body cavity from the valve cover cavity and the driving components. This pneumatic diaphragm valve is designed compactly and assembled in a cleanroom environment. The overall material used is PTFE, which has good resistance to highly pure and corrosive chemicals.

Features:

Auto valve that automatically regulates On-Off using compressed air (single-acting/double-acting).

2.Suitable for semiconductors and LCD (CCSS and WET equipment), chemicals, and DI water.

Sturdy and simple design.
Can be used for high temperature, high pressure, acidic, and alkaline fluids.
Fluid temperature: 0~90℃.
Pipe size: 3/8″.

About Semirefurb

Semiconductor Spare Parts Supplier

We are the professional supplier of semiconductor spare part for IC manufacturing industry. We have over 2300 items in stock ready to supply to our clients. We also offer repair and maintenance for critical parts and used equipments.