Semiconductor Equipment Refurbish
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Semiconductor Spare Parts Catalog
AMAT parts
LAM Part
TEL Parts
Self-Develop Tool & Parts
Dual Stack SRD Spin Rinse Dryer
Our self-developed spin rinse dryer has the specification as below:
Basic Function: DIW Rinse,Pipe Purge,Spin Dry,Hot N2.
Max. Speed of spin: Up to 2,800rpm(200 mm/2400rpm300mm/2000rpm.
With N2 continuous purge. N2 flow can be heated up to 70C.
With DIW Resistance meter.
With Anti-Static Device. With N2 Low flow interlock.
With EMO function.
Capacity: Up to 15 recipes.
Max. Steps per recipe: Up to 10 steps.
With Auto-Clean Function.
The vibration is less than 350 um while rotor spinning.(200 mm/ 300 mm,300 um).
Spin speed tolerance:Less than 10%.
With SUS-316L-EP Rotor. With SUS-316L-EP Bowl.
…And more features!
About Semirefurb
Semiconductor Spare Parts Supplier
We are the professional supplier of semiconductor spare part for IC manufacturing industry. We have over 2300 items in stock ready to supply to our clients. We also offer repair and maintenance for critical parts and used equipments.
Semiconductor Spare Parts In Stock
Motor
Controller
Power Supply
Valve
Robot
PCB
Driver
Gauge
Other Spare Parts